The world's brightest EUV source
NANO-UV is the first company ever to deploy PlasmaLens™ technology in a viable architecture. This means we can place our light collection and projection optics, much closer to the light source than has ever been thought possible. We have a source that can produce EUV light at the brightness levels normally encountered in costly Synchrotrons.
Specific features of the i-SoCoMo™
- Small footprint. 45 cm long and 14 cm wide
- PlasmaLens™ for photon collection. Low cost and indestructible
- Exceptional brightness. 1x1016 EUV photons/cm2/s*
- Unprecedented source power. 8000 W/2π sr
- Near-zero debris at IF
(*) Irradiance (13.5 nm, 4% BW) 67 cm from the source
Multiplexed Power for EUVL HVM
Thanks to its revolutionary PlasmaLens™ technology, NANO-UV's source sets new standards for design and simplicity. This means absolute reliability in a physical package many times smaller than previous generation solutions. Thanks to those dimensions, modular multiplexing of hundreds of sources is now possible.
NANO-UV can support EUVL deployment for the whole industry at the 32nm node. And built-in scalability means we will go on enabling EUVL right through to 16nm node and beyond.
HYDRA-100
Features and benefits
- Absolute reliability. Zero downtime
- No external collector
- A new benchmark in optimized cost of ownership