i-SoCoMo(tm)

Specific features of the i-SoCoMo™

  • Small footprint. 45 cm long and 14 cm wide
  • PlasmaLens™ for photon collection. Low cost and indestructible
  • Exceptional brightness. 1x1016 EUV photons/cm2/s*
  • Unprecedented source power. 8000 W/2π sr
  • Near-zero debris at IF

(*) Irradiance (13.5 nm, 4% BW) 67 cm from the source

Multiplexed Power for EUVL HVM

Thanks to its revolutionary PlasmaLens™ technology, NANO-UV's source sets new standards for design and simplicity. This means absolute reliability in a physical package many times smaller than previous generation solutions. Thanks to those dimensions, modular multiplexing of hundreds of sources is now possible.

NANO-UV can support EUVL deployment for the whole industry at the 32nm node. And built-in scalability means we will go on enabling EUVL right through to 16nm node and beyond.

HYDRA-100

Features and benefits

  • Absolute reliability. Zero downtime
  • No external collector
  • A new benchmark in optimized cost of ownership