HYDRA - ABI

The HYDRA^TM- ABI, four i-SoCoMo’s multiplexed together, has been optimised to meet the system requirements of next generation mask blank actinic inspection tools. Exploiting the shorter wavelengths and brightness of HYDRA^TM - ABI, makes possible the detection of defect structures in mask blanks corresponding to printed features sizes of 5 nm at the wafer. Good signal levels and hence discrimination of defect regions are achievable by using the combined brightness of four i-SoCoMo^TM units running in a multiplexed mode in HYDRA^TM - ABI. This total pulsed rate of 12 kHz provides the required brightness levels for blank mask inspection, making the HYDRA^TM - ABI the only off-the-shelf source solution for mask blank inspection available today.