Edited: 2009/05/06
November 18-19 2009, NanoUV presented both a modelling study and the experimental results of the i-SoCoMo concept, an impulse discharge plasma source with an integrated photon collector based on an active plasma structure. The small physical size and low etendue properties of the “i-SoCoMo” unit allows for a large number of such sources to be combined in to one physical package and to be operated in a multiplexed fashion, to meet the necessary power requirements for HVM source solutions.
@ Taipe, Taiwan